Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same

ABSTRACT

Susceptor assemblies, reactors and systems including the assemblies, and methods of using the assemblies, reactors, and systems are disclosed. Exemplary susceptor assemblies include two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature. The movement of the two or more sections can additionally or alternatively be used to manipulate conductance of gas flow through a reactor.

This application is a Divisional of, and claims priority to and the benefit of, U.S. patent application Ser. No. 14/508,489, filed Oct. 7, 2014 and entitled “MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM INCLUDING THE SUSCEPTOR, AND METHODS OF USING THE SAME,” which is hereby incorporated by reference herein.

FIELD OF DISCLOSURE

The present disclosure generally relates to a heating and cooling apparatus. More particularly, the disclosure relates to susceptors and susceptor assemblies that can be used to provide heat to a substrate, to reactors and systems that include the susceptors and/or assemblies, and to methods of using the same.

BACKGROUND OF THE DISCLOSURE

Gas-phase processes, such as chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), atomic layer deposition (ALD), and the like are often used to deposit materials onto a surface of a substrate, etch material from a surface of a substrate, and/or clean or treat a surface of a substrate. For example, gas-phase processes can be used to deposit or etch layers on a substrate to form semiconductor devices, flat panel display devices, photovoltaic devices, microelectromechanical systems (MEMS), and the like.

Reactors used in gas-phase processing often include a susceptor to hold a substrate in place and to heat or cool the substrate during processing. The susceptor is generally configured to heat (or cool) a substrate to a temperature within a specific range. The design configurations of the susceptor generally depend on the operating temperatures of a reactor. For example, a susceptor can be made of particular materials and have a particular mass based on the desired heating properties of the susceptor. By way of examples, some susceptors can be configured to operate in a temperature range of about 200° C. to about 600° C., and other susceptors can be configured to operate in a range of about 10° C. to about 200° C.

In some cases, it may be desirable expose a substrate within a reactor to two or more different processes that run at substantially different temperatures. In these cases, the susceptor is likely not ideal to use at one or more of process temperatures. For example, high temperature (e.g., greater than about 200° C.) processes often use a high mass, high watt density susceptor to allow heating of the susceptor and the substrate. In contrast, lower temperature processes (e.g., less than about 200° C.) generally employ high mass, lower watt density susceptors, but in both cases the mass of the heater is high due to desirably maintaining a constant temperature setting.

In addition, if the susceptor is used for processes running at substantially different temperatures, it can take an undesirably long time to heat and/or cool the susceptor from one process temperature to another. Accordingly, improved susceptors, which can be used to process substrates at different temperatures and that are capable of rapidly changing substrate temperature, are desired.

SUMMARY OF THE DISCLOSURE

Various embodiments of the present disclosure provide susceptor assemblies, reactors and systems including the susceptor assemblies, and methods of using the susceptor assemblies, reactors, and systems. The susceptor assemblies described herein are suitable for use in a variety of gas-phase processes, such as chemical vapor deposition processes (including plasma-enhanced chemical vapor deposition processes), gas-phase etching processes (including plasma-enhanced gas-phase etching processes), gas-phase cleaning (including plasma-enhanced cleaning processes), and gas-phase treatment processes (including plasma-enhanced gas-phase treatment processes). As set forth in more detail below, exemplary susceptor assemblies, reactors, systems and methods are particularly well suited for processes that include multiple processes and/or that desirably run at multiple temperatures within a reaction chamber.

In accordance with various embodiments of the disclosure, a susceptor assembly includes multiple sections that can move independently of each other to readily allow processing of a substrate within a reaction chamber at different temperatures. In accordance with various aspects of these embodiments, the susceptor assembly includes a susceptor first section, a susceptor second section, and a mechanism to move the susceptor first section relative the susceptor second section. To facilitate rapid provision of different substrate temperatures within a reaction chamber, the susceptor first section can be formed of a first material and the susceptor second section can be formed of a second material. In accordance with some exemplary aspects of these embodiments, the susceptor first section and the susceptor second section are coaxial. The susceptor first section and the susceptor second section can be parallel in some configurations, and when one of the susceptor first section and the susceptor second section are moved relative to the other section, the sections can remain parallel each other. The susceptor first section can be formed of a relatively low mass and/or high watt density heating material, compared to the susceptor second section, which can be formed of a relatively high mass material. The susceptor second section material can be, for example, a heat sink, and can be cooled with a fluid, such as water. During operation, a substrate can be heated with the susceptor first section to obtain a substrate temperature of about 200° C. to about 600° C. The substrate can heated or cooled with the susceptor first section and the susceptor second section to obtain a substrate temperature of about 10° C. to about 200° C.

In accordance with further exemplary embodiments of the disclosure, a reactor includes one or more susceptor assemblies as described herein.

In accordance with yet additional exemplary embodiments of the disclosure, a reactor system includes one or more susceptor assemblies as described herein.

And, in accordance with yet additional exemplary embodiments of the disclosure, a gas-phase method includes the steps of placing a substrate on a surface of a susceptor assembly, exposing the substrate to a first process when a susceptor first section is in a first position and at a first susceptor temperature, moving the susceptor first section relative to the susceptor second section to a second position, and exposing the substrate to a second process at a second susceptor temperature. In accordance with various aspects of these embodiments, the first temperature is higher than the second temperature. For example, the first temperature can be in a range of about 200° C. to about 600° C.; the second temperature can be in a range of about 10° C. to about 200° C. In accordance with further aspects of these illustrative embodiments, a conductance from a reaction zone of a reaction chamber to a vacuum source varies as the susceptor first section and the susceptor second section are moved relative to each other.

Both the foregoing summary and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure or the claimed invention.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

A more complete understanding of exemplary embodiments of the present disclosure can be derived by referring to the detailed description and claims when considered in connection with the following illustrative figures.

FIG. 1 illustrates a gas-phase reactor, including a susceptor assembly, wherein a susceptor first section is spaced apart from a susceptor second section in accordance with various embodiments of the disclosure.

FIG. 2 illustrates a gas-phase reactor, including a susceptor assembly, wherein a susceptor first section is above a susceptor second section in accordance with various embodiments of the disclosure.

FIG. 3 illustrates a susceptor first section in accordance with exemplary embodiments of the disclosure.

FIG. 4 illustrates a reactor system, including a susceptor assembly, in accordance with additional exemplary embodiments of the disclosure.

FIG. 5 illustrates a gas-phase method in accordance with further exemplary embodiments of the disclosure.

It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help to improve the understanding of illustrated embodiments of the present disclosure.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS OF THE DISCLOSURE

The description of exemplary embodiments provided below is merely exemplary and is intended for purposes of illustration only; the following description is not intended to limit the scope of the disclosure or the claims. Moreover, recitation of multiple embodiments having stated features is not intended to exclude other embodiments having additional features or other embodiments incorporating different combinations of the stated features.

As set forth in more detail below, various embodiments of the disclosure relate to susceptor assemblies, reactors and reactor systems that include a susceptor assembly, and to methods of using the susceptor assemblies, reactors, and systems. The susceptor assemblies, reactors, systems, and methods can be used for a variety of gas-phase processes, such as deposition, etch, clean, and/or treatment processes. The susceptor assemblies can be used to rapidly change susceptor and therefore a substrate temperature. Thus, exemplary susceptor assemblies can be used to perform multiple processes at different susceptor temperatures, within a reaction chamber.

FIGS. 1 and 2 illustrate a gas-phase reactor 100 in accordance with exemplary embodiments of the disclosure. Gas-phase reactor 100 includes a reaction chamber 102, a susceptor assembly 104, and a gas distribution system 106, a first vacuum source 108, and a second vacuum source 110. Although not illustrated, system 100 may additionally include direct and/or remote plasma and/or thermal excitation apparatus for one or more reactants and/or within reaction chamber 102.

Reactor 100 can be used to deposit material onto a surface of a substrate 112, etch material from a surface of substrate 112, clean a surface of substrate 112, treat a surface of substrate 112, deposit material onto a surface within reaction chamber 102, clean a surface within reaction chamber 102, etch a surface within reaction chamber 102, and/or treat a surface within reaction chamber 102. Reactor 100 can be a standalone reactor or part of a cluster tool. Further, reactor 100 can be dedicated to deposition, etch, clean, or treatment processes, or reactor 100 may be used for multiple processes—e.g., for any combination of deposition, etch, clean, and treatment processes. By way of examples, reactor 100 can include a reactor typically used for chemical vapor deposition (CVD) processes, such as atomic layer deposition (ALD) processes. As set forth in more detail below, use of susceptor assembly 104 allows rapid change and control of a substrate temperature within reaction chamber 102, and thus facilitates subjecting substrate 112 to multiple temperatures during one or more processes within reaction chamber 102.

Susceptor assembly 104 is designed to hold substrate 112 in place during processing. As discussed in more detail below, one or more sections of susceptor assembly 104 can be heated, cooled, or be at ambient process temperature during processing.

As illustrated in FIGS. 1 and 2 , susceptor assembly 104 includes a susceptor first section 114, a susceptor second section 116, and a mechanism 118 to move susceptor first section 114 relative to susceptor second section 116.

In the illustrated example, mechanism 118 moves susceptor first section 114 relative to susceptor second section 116 and susceptor second section 116 is stationary within reaction chamber 102. However, in accordance with other configurations in accordance with exemplary embodiments of the present disclosure, mechanism 118 moves susceptor second section 116 relative to susceptor first section 114. Alternatively, mechanism 118 can move both susceptor first section 114 and susceptor second section 116.

Mechanism 118 can include any suitable apparatus capable of moving susceptor first section 114 relative to susceptor second section 116. By way of example, mechanism 118 includes a servo motor to drive susceptor first section 114 along an axis. Mechanism 118 can suitably reside outside reaction chamber 102.

Susceptor first section 114 can be configured to rapidly heat substrate 112 to a desired temperature. For example, susceptor first section 114 can be configured to rapidly heat substrate 112 for high temperature processing (e.g., in the range of about 200° C. to about 600° C., about 200° C. to about 310° C., or about 250° C. to about 500° C. Such high-temperature processes can be used to, for example, pre-treat substrate 112 surface, to degas substrate 112, or the like.

To allow rapid heating of susceptor first section 114, susceptor first section 114, in accordance with examples of the disclosure, is of relatively low mass—e.g., about 150 g to about 450 g, or about 450 g to about 3000 g. Further, susceptor first section 114 can include a relatively high watt density—e.g., about 70 W/cm2 to about 100 W/cm2, or about 50 W/cm2 to about 200 W/cm2.

Exemplary materials suitable for susceptor first section 114 include ceramics, such as boron nitride, aluminum nitride, quartz, and ceramic-coated materials, such as ceramic-coated metals. Susceptor first section 114 can also include resistive heating material. Exemplary materials suitable for resistive heating material include Tungsten (W), Nichrome (NiCr), Cupronickel (CuNi), Graphite©, Molybdenum Disilicide (MoSi2) or any other suitable heater material. The resistive heating material can be coated onto (e.g., patterned onto), for example, ceramic or ceramic-coated metal. Susceptor first section 114 can include an additional protective layer formed overlying the resistive heating material. The protective layer can be formed of, for example, ceramic material.

FIG. 3 illustrates an exemplary susceptor first section 114, which includes a first layer 302, a second layer 304, and a third layer 306. First layer 302 can include any suitable substrate, such as ceramic or metal-coated with insulating (e.g., ceramic) material. Layer 304 can include electrically resistive heating material, such as the exemplary resistive material described above. Layer 304 can be a solid layer or patterned (e.g., serpentine). Finally, layer 306 can include ceramic or other suitable material. Although illustrated with three layers, susceptor first section 114 can be formed of a single material, two layers, or more than three layers.

Susceptor second section 116 can be configured to provide substrate 112 with a lower temperature—e.g., a temperature in the range of about 10° C. to about 200° C., about 5° C. to about 100° C., or about 15° C. to about 60° C., or about 100° C. to about 200° C. For example, the lower substrate temperature can be obtained by lowering susceptor first section 114 near (e.g., with 1-15 mm) or adjacent to susceptor second section 116.

To facilitate a rapid change (e.g., decrease) in temperature provided to substrate 112, susceptor second section 116 can have a relatively high mass (e.g., about 6000 g to about 12,000 g, or about 12,000 g to about 16,000 g). In this case, susceptor second section 116 can act as a heat sink: to cool susceptor first section 114 and substrate 112. Susceptor second section 116 can include fluid (e.g., water) lines 120 to maintain susceptor second section 116 at a desired temperature.

Susceptor second section 116 can be formed of a second material (e.g., different from the first material of susceptor first section 114). Exemplary materials suitable for susceptor second section 116 include aluminum, nickel coated aluminum, 316 SS, Tungsten, Hastelloy, Inconel, Nickel or any suitable material.

A configuration of susceptor first section 114 and susceptor second section 116 can vary according to application and reactor design. In the illustrated example, susceptor first section 114 overlies susceptor second section 116. Susceptor first section 114 can move from a position near (or adjacent) susceptor second section 116 to a position away from susceptor second section 116. The distance between susceptor first section 114 and susceptor second section 116 can range from about 0 to about 35 mm, or about 10 mm to about 25 mm, or about 10 mm to about 30 mm.

As illustrated, susceptor first section 114 can have a larger diameter than susceptor second section 116. Alternatively, susceptor first section 114 can have the same, or a smaller diameter than susceptor second section 116, depending on, for example, reactor configuration and desired gas flow characteristics within reaction chamber 102.

In the illustrated example, susceptor first section 114 is shaped as a solid cylinder. However, susceptor first section 114 can have any suitable shape, including a hollow cylinder that can rest in a coplanar position relative to a top surface of susceptor second section 116.

Similarly, susceptor second section 116 can include any suitable shape, such as a solid or hollow cylinder, or the like.

FIGS. 1 and 2 illustrate how a gas flow pattern can be altered by moving susceptor first section 114 relative to susceptor second section 116. In FIG. 1 , susceptor first section 114 in a first position spaced apart from susceptor second section 116 allows gas within reaction chamber 102 to readily flow between susceptor first section 114 and reaction chamber wall 203 through a first fluid path 204 in the direction of the arrows toward first vacuum source 108. In FIG. 2 , susceptor first section 114 is in a second position near or adjacent to susceptor second section 116, restricting gas flow between susceptor first section 114 and reaction chamber wall 203 through first fluid path 204 (relative to the gas flow through first fluid path 204 created by susceptor first section 114 being further from susceptor second section 116 and/or reaction chamber wall 203 (e.g., susceptor first section 114 being in the first position)) and allowing gas within reaction chamber 102 to flow through a second fluid path 206 in the direction of the arrows toward second vacuum source 110.

First and/or second vacuum sources 108, 110 may be in fluid communication with reaction chamber 102. First and second vacuum sources 108, 110 can include any suitable vacuum source capable of providing a desired pressure in reaction chamber 102. By way of examples, vacuum source 108 can include a pump to maintain a high vacuum (e.g., in the range of about 5×10-7 Torr to about 500 Torr)—e.g., turbomolecular pump; second vacuum source 110 can include, for example, a dry vacuum pump alone or in combination with a turbomolecular pump. Although illustrated as two separate sources, in accordance with other exemplary embodiments, reactor 100 can include one or more than two vacuum sources. Multiple vacuum sources can be coupled to the same vacuum pump. In this case, a conductance of the multiple sources can vary.

The change in gas flow conductance can be used in combination with varying substrate temperatures to obtain desired reaction rates and uniformity across substrate 112 surface.

Referring again to FIGS. 1 and 2 , reactor 100 can include a gas inlet 122 to receive and facilitate distribution of one or more gases to reaction chamber 102. Although gas inlet 122 is illustrated in block form, gas inlet 122 may be relatively complex and be designed to mix gas (e.g., vapor) from reactant sources and/or carrier/purge gases from one or more sources prior to distributing the gas mixture to reaction chamber 102. Further, gas inlet 122 can be configured to provide vertical (as illustrated) or horizontal flow of gases to chamber 104. An exemplary gas distribution system is described in U.S. Pat. No. 8,152,922 to Schmidt et al., issued Apr. 10, 2012, entitled “Gas Mixer and Manifold Assembly for ALD Reactor,” the contents of which are hereby incorporated herein by reference, to the extent the contents do not conflict with the present disclosure. Gas inlet 122 can optionally include an integrated manifold block designed to receive and distribute one or more gases to reaction chamber 104. An exemplary integrated inlet manifold block is disclosed in U.S. Pat. No. 7,918,938 to Provencher et al., issued Apr. 5, 2011, entitled “High Temperature ALD Inlet Manifold,” the contents of which are hereby incorporated herein by reference, to the extent the contents do not conflict with the present disclosure.

FIG. 4 illustrates a system 400 in accordance with various exemplary embodiments of the disclosure. System 400 includes reactor 402, which includes a susceptor assembly 404. Reactor 402 and susceptor assembly 404 can be the same or similar to reactor 100 and susceptor assembly 104.

System 400 also includes one or more reactant sources 406, 408 and a carrier and/or purge gas source 410. Reactant gas sources 406, 408 can each include one or more gases, or materials that become gaseous, that are used in deposition, etch, clean, or treatment processes. Exemplary gas sources include Halogens, NF3, HH3, HCL, H2O/H2O2 Vapor. Although illustrated with two reactant gas sources 406, 408, systems in accordance with the disclosure can include any suitable number of reactant sources.

Purge/carrier gas source 410 includes one or more gases, or materials that become gaseous, that are relatively unreactive in reactor 402. Exemplary purge gases include nitrogen, argon, helium, and any combinations thereof. Although illustrated with one purge gas source, systems in accordance with the present disclosure can include any suitable number of purge gas sources. Further, one or more purge gas sources can provide one or more carrier gases and/or system 400 can include additional carrier gas sources to provide a carrier gas to be mixed with one or more gases from a reactant source, such as sources 406, 408.

Turning now to FIG. 5 , a gas-phase method 500 is illustrated. Method 500 includes the steps of placing a substrate on a surface of a susceptor assembly (step 502), exposing the substrate to a first process (step 504), moving a susceptor first section relative to a susceptor second section to a second position (step 506), and exposing the substrate to a second process at a second susceptor temperature (step 508). In accordance with exemplary aspects of these embodiments, the first process and the second process can be run at different temperatures. For example, the first process can be run at a temperature of about 200° C. to about 600° C.; the second process can be run at, for example, 10° C. to about 200° C. Additionally or alternatively, the substrate can be exposed to different reactants or inert gases during the first and second processes. And, the gas flow patterns can be varied, as described above, for the first and second processes. One or more of these changes can be made to distinguish the first process from the second process. The first and second processes can be the same (e.g., deposition) or different (e.g., clean, deposition) types of processes.

Although exemplary embodiments of the present disclosure are set forth herein, it should be appreciated that the disclosure is not so limited. For example, although the susceptor assemblies, reactors systems, and methods are described in connection with various specific configurations, the disclosure is not necessarily limited to these examples. Various modifications, variations, and enhancements of the exemplary susceptor assemblies, reactors, systems, and methods set forth herein may be made without departing from the spirit and scope of the present disclosure.

The subject matter of the present disclosure includes all novel and nonobvious combinations and subcombinations of the various systems, assemblies, reactors, components, and configurations, and other features, functions, acts, and/or properties disclosed herein, as well as any and all equivalents thereof. 

What is claimed is:
 1. A gas-phase method comprising the steps of: providing a reaction chamber with a vacuum source; placing a substrate on a surface of a susceptor assembly comprising a susceptor first section and a susceptor second section, wherein the susceptor first section is disposed above the susceptor second section; exposing the substrate to a first process when the susceptor first section is in a first position and at a first susceptor temperature; moving the susceptor first section relative to the susceptor second section to a second position; and exposing the substrate to a second process at a second susceptor temperature, wherein the second susceptor temperature is lower than the first susceptor temperature, wherein the reaction chamber comprises a first fluid path and a second fluid path, wherein a gas within the reaction chamber flows through the first fluid path in response to the susceptor first section being in the first position, and wherein the gas within the reaction chamber flows through the second fluid path in response to the susceptor first section being in the second position, wherein the first fluid path and the gas flow therethrough is restricted in response to the susceptor first section being in the second position, wherein the vacuum source is in fluid communication with at least one of the first fluid path or the second fluid path, and wherein the vacuum source is in fluid communication with both the first fluid path and the second fluid path, wherein respective fluid outlets to the vacuum source from both the first fluid path and the second fluid path are below both the susceptor first section and the susceptor second section.
 2. The gas-phase method of claim 1, wherein the second susceptor temperature is between about 100° C. and about 200° C.
 3. The gas-phase method of claim 1, wherein the first susceptor temperature is between about 200° C. and about 600° C.
 4. The gas-phase method of claim 1, wherein the second susceptor temperature is between about 10° C. and about 200° C.
 5. The gas-phase method of claim 1, wherein a gas conductance to a vacuum source is greater when the susceptor first section is in a first position relative to when the susceptor first section is in a second position.
 6. The gas-phase method of claim 1, wherein a diameter of the susceptor first section is larger than a diameter of the susceptor second section.
 7. The gas-phase method of claim 1, wherein moving the susceptor first section relative to the susceptor second section to the second position comprises a mechanism coupled to the susceptor that moves the susceptor first section, and wherein the susceptor first section and the susceptor second section are coupled to the mechanism via an axis.
 8. The gas-phase method of claim 1, wherein the susceptor first section has a watt density of about 70 W/cm² to about 100 W/cm².
 9. The gas-phase method of claim 1, wherein the distance between the first position and the second position is between 10 mm to 30 mm.
 10. The gas-phase method of claim 1, wherein the susceptor second section comprises fluid lines and is formed of a second material.
 11. The gas-phase method of claim 1, wherein the second material comprises a metal selected from the group consisting of aluminum, nickel-coated aluminum, stainless steel, Tungsten, Hastelloy, Inconel, and Nickel.
 12. The gas-phase method of claim 1, wherein the susceptor first section comprises a layer coated with electrically insulating material.
 13. The gas-phase method of claim 1, wherein the susceptor first section comprises a layer comprising an electrically resistive heating material.
 14. The gas-phase method of claim 1, wherein the susceptor first section comprises a layer comprising a ceramic material.
 15. The gas-phase method of claim 1, wherein the susceptor first section comprises a first layer comprising metal coated with electrically insulating material, a second layer comprising an electrically resistive heating material, and a third layer comprising a ceramic material.
 16. A gas-phase method comprising the steps of: providing a reaction chamber with a vacuum source; placing a substrate on a surface of a susceptor assembly comprising a susceptor first section and a susceptor second section, wherein the susceptor first section is disposed above the susceptor second section; exposing the substrate to a first process when the susceptor second section is in a first position and at a first susceptor temperature; moving the susceptor second section relative to the susceptor first section to a second position; and exposing the substrate to a second process at a second susceptor temperature, wherein the second susceptor temperature is lower than the first susceptor temperature, wherein the reaction chamber comprises a first fluid path and a second fluid path, wherein a gas within the reaction chamber flows through the first fluid path in response to the susceptor first section being in the first position, and wherein the gas within the reaction chamber flows through the second fluid path in response to the susceptor first section being in the second position, wherein the first fluid path and the gas flow therethrough is restricted in response to the susceptor first section being in the second position, wherein the vacuum source is in fluid communication with at least one of the first fluid path or the second fluid path, and wherein the vacuum source is in fluid communication with both the first fluid path and the second fluid path, wherein respective fluid outlets to the vacuum source from both the first fluid path and the second fluid path are below both the susceptor first section and the susceptor second section.
 17. The gas-phase method of claim 16, wherein the first susceptor temperature is between about 200° C. and about 600° C.
 18. The gas-phase method of claim 16, wherein the second susceptor temperature is between about 10° C. and about 200° C.
 19. The gas-phase method of claim 16, wherein a gas conductance to a vacuum source is greater when the susceptor second section is in a first position relative to when the susceptor second section is in a second position. 